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Experimental tests were first carried out for three heating lamp power values. ... Both a two and a three dimensional (2D and 3D) model of the Jetstar 200 were realized and the Monte Carlo method was used for solving the ... EXPERIMENTAL The schematic diagram of the Jetstar 200 RTLPCVD reactor is shown in figure /.

Title:EUROCVD 15
Author: Anjana Devi
Publisher:The Electrochemical Society - 2005

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