Plasma-Surface Interactions and Processing of Materials

Plasma-Surface Interactions and Processing of Materials

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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.Soc. Symp. Proc. , Vol. 38, ed. by R. P. H. Chang and B. Abeles (Materials Research Society Pittsburgh PA. 1985) p. ... 253, Academic Press, New York, 1984 (47) Quad etchers, made by Drytek, 16 Jonspin Rd., Wilminton, Mass. ... (50 ) AME model 8000 series etchers, made by Applied Materials Inc., 3050 Bowers Ave., Santa Clara, Cal. ... (69) MIE 700 series etchers made by Materials Research Corporation, Orangeburg, N.Y. (70) K. Suzuki, K. Ninomiya and S. Nishimatsu, Vacuumanbsp;...

Title:Plasma-Surface Interactions and Processing of Materials
Author: O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm
Publisher:Springer Science & Business Media - 2012-12-06

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