Thin Film Transistor Technologies

Thin Film Transistor Technologies

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DEPOSITION CONDITIONS AND DEVICE CONFIGURATION All silicon films were deposited in the multi-chamber ultra-high-vacuum system PASTA [5]. For TFTs, the films ... A schematic picture of the structure of an a-Si:H TFT is shown in Figure 1. The width of the channel is 300 //m and the length is 60 //m. Single layersanbsp;...

Title:Thin Film Transistor Technologies
Author: Yue Kuo
Publisher:The Electrochemical Society - 1999

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